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Hydrogen outgassing induced liner barrier reliability degradation in through silicon via's
Publication:
Hydrogen outgassing induced liner barrier reliability degradation in through silicon via's
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Date
2014
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Li, Yunlong
;
Oba, Yoshiyuki
;
Wu, Chen
;
Van Huylenbroeck, Stefaan
;
Van Besien, Els
;
Vereecke, Guy
;
Stucchi, Michele
;
De Wolf, Ingrid
;
Beyer, Gerald
;
Beyne, Eric
;
Croes, Kristof
Journal
Applied Physics Letters
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1953
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Acq. date: 2026-02-24
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Views
1953
since deposited on 2021-10-22
1
last month
1
last week
Acq. date: 2026-02-24
Citations