Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Dissertations
View item
imec Publications Repository
imec Publications
Dissertations
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
In Depth Understanding of Low-k Dielectric Reliability in Interconnect Systems
View/
open
43275.pdf (5.975Mb)
Metadata
Show full item record
Authors
Wu, Chen
Supervisor
De Wolf, Ingrid; Groeseneken, Guido
Title
In Depth Understanding of Low-k Dielectric Reliability in Interconnect Systems
Publication type
PHD thesis
Embargo date
9999-12-31
Collections
Dissertations
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login