Current understanding of BEOL TDDB lifetime models

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Authors

Croes, Kristof; Wu, Chen; Kocaay, Deniz; Li, Yunlong; Roussel, Philippe; Boemmels, Juergen; Tokei, Zsolt

ISSN

2162-8769

Issue

1

Journal

ECS Journal of Solid State Science and Technology

Volume

4

Title

Current understanding of BEOL TDDB lifetime models

Publication type

Journal article

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