Browsing by author "Prokhodtseva, Anna"
Now showing items 1-3 of 3
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Electron channeling contrast imaging: potential for future metrology in semiconductor industry
Vystavel, Tomas; Prokhodtseva, Anna; Schulze, Andreas; Caymax, Matty (2016) -
Seeing the invisible: metrology for extended crystalline defects in beyond silicon semiconductors
Schulze, Andreas; Prokhodtseva, Anna; Vystavel, Tomas; Gachet, David; Berney, Jean; Loo, Roger; Vandervorst, Wilfried; Caymax, Matty (2016) -
Seeing the invisible: metrology for extended defects in beyond-silicon semiconductor device structures
Schulze, Andreas; Prokhodtseva, Anna; Vystavel, Tomas; Gachet, David; Berney, Jean; Loo, Roger; Vandervorst, Wilfried; Caymax, Matty (2017)