Browsing by author "Valckx, Nick"
Now showing items 1-9 of 9
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Electrochemical and analytical study of the Si etching
Valckx, Nick (2010) -
Electrochemical and analytical study of the Si etching mechanism in HF
Valckx, Nick; Vos, Rita; Rip, Jens; Doumen, Geert; Mertens, Paul; Bearda, Twan; Heyns, Marc; De Gendt, Stefan (2009) -
Electrochemical and analytical study of the Si etching mechanism in HF
Valckx, Nick; Vos, Rita; Rip, Jens; Doumen, Geert; Mertens, Paul; Bearda, Twan; Heyns, Marc; De Gendt, Stefan (2009) -
HF etching mechanisms of heavily doped Si
Valckx, Nick (2011-09) -
Investigation of metallic contamination analysis using vapor phase decomposition – droplet collection – total reflection X-ray fluorescence (VPD-DC-TXRF) for Pt-group elements on silicon wafers
Hellin, David; Valckx, Nick; Rip, Jens; De Gendt, Stefan; Vinckier, Chris (2008) -
Lossless solvent-based extension implant strip
Vos, Rita; Mannaert, Geert; Halder, Sandip; Wada, Masayuki; Sonnemans, Roger; Tsvetanova, Diana; Valckx, Nick; Vanstreels, Kris; Conard, Thierry; Mertens, Paul (2009) -
Lossless solvent-based extension implant strip
Vos, Rita; Mannaert, Geert; Halder, Sandip; Wada, Masayuki; Sonnemans, Roger; Tsvetanova, Diana; Valckx, Nick; Vanstreels, Kris; Conard, Thierry; Mertens, Paul (2009) -
Study of the etching mechanism of heavily doped Si in HF
Valckx, Nick; Cuypers, Daniel; Vos, Rita; Philipsen, Harold; Rip, Jens; Doumen, Geert; Mertens, Paul; Heyns, Marc; De Gendt, Stefan (2010) -
Wet etching of heavily doped Si in HF: a mechanistic study
Valckx, Nick (2010)