Browsing by imec author "2966df535b146f3f194ea22daa561781859d4ecd"
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Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry
Claessens, Niels; Khan, Zamran Zahoor; Rahnemaihaghighi, Negin; Delabie, Annelies; Vantomme, Andre; Vandervorst, Wilfried; Meersschaut, Johan (2022) -
Quantifying the Ru area selective deposition in nanometer confined volumes using RBS
Claessens, Niels; Rahnemaihaghighi, Negin; Delabie, Annelies; Vandervorst, Wilfried; Vantomme, Andre; Meersschaut, Johan (2021)