Quantifying the Ru area selective deposition in nanometer confined volumes using RBS

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Authors
Claessens, Niels; Rahnemaihaghighi, Negin; Delabie, Annelies; Vandervorst, Wilfried; Vantomme, Andre; Meersschaut, Johan
Conference
EMRS ALTECH 2021 - Analytical techniques for precise characterization of nanomaterials
Title
Quantifying the Ru area selective deposition in nanometer confined volumes using RBS
Publication type
Meeting abstract
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