Publication:

Quantifying the Ru area selective deposition in nanometer confined volumes using RBS

Date

2021
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Author(s)

Claessens, Niels  
;
Rahnemaihaghighi, Negin  
;
Delabie, Annelies  
;
Vandervorst, Wilfried  
;
Vantomme, Andre
;
Meersschaut, Johan  

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2038 since deposited on 2021-10-31
Acq. date: 2026-06-05

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2038 since deposited on 2021-10-31
Acq. date: 2026-06-05

Citations