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Conference contributions
Quantifying the Ru area selective deposition in nanometer confined volumes using RBS
Publication:
Quantifying the Ru area selective deposition in nanometer confined volumes using RBS
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Date
2021
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Claessens, Niels
;
Rahnemaihaghighi, Negin
;
Delabie, Annelies
;
Vandervorst, Wilfried
;
Vantomme, Andre
;
Meersschaut, Johan
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2033
since deposited on 2021-10-31
Acq. date: 2025-12-15
Citations
Metrics
Views
2033
since deposited on 2021-10-31
Acq. date: 2025-12-15
Citations