Browsing by author "Daniels, Stephen"
Now showing items 1-4 of 4
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Al speed fill
Beyer, Gerald; Maex, Karen; Daniels, Stephen; Lee, S.; Proost, Joris; Bender, Hugo; Judelewicz, Moshe; Maity, Nirmalya (1999) -
IMP liners for Al via speed fill
Beyer, Gerald; Maex, Karen; Daniels, Stephen; Maity, Nirmalya; Bassanini, Davide (1999) -
IMP liners for all speed fill
Beyer, Gerald; Maex, Karen; Daniels, Stephen; Maity, Nirmalya; Bassanini, Davide (1998) -
Oxygen chemiluminescence in a He plasma as a method for plasma damage evaluation of low-k dielectrics
Urbanowicz, Adam; Baklanov, Mikhaïl; Shamiryan, Denis; Soberon, Felipe; Daniels, Stephen; De Gendt, Stefan (2008)