Browsing by author "Takahata, Yosuke"
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Mask absorber, mask tone, and wafer process impact on resist line-edge-roughness
Ohtomi, Eisuke; Philipsen, Vicky; Welling, Ulrich; Melvin III, Lawrence S.; Takahata, Yosuke; Tanaka, Yusuke; De Simone, Danilo (2023)