Browsing by author "Zeidler, D."
Now showing items 1-2 of 2
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High-throughput multi-beam SEM: quantitative analysis of imaging capabilities at imec-N10 logic node
Neumann, J.T.; Garbowski, T.; Högele, W.; Korb, T.; Halder, Sandip; Leray, Philippe; Garreis, R.; le Maire, M.; Zeidler, D. (2017) -
Imaging semiconductor patterns at N10 logic node with a high-throughput multi-beam SEM
Neumann, J.T.; Garaboski, T.; Halder, Sandip; Leray, Philippe; Garreis, R.; Zeidler, D. (2016)