Browsing by author "van Drieënhuizen, Bert"
Now showing items 1-1 of 1
-
SLM device for 193 nm lithographic applications
Lauria, John; Albright, Ronald; Vladimirsky, Olga; Chen, Luoqi; Hoeks, Maarten; Vanneer, Roel; van Drieënhuizen, Bert; Haspeslagh, Luc; Witvrouw, Ann; Schlatmann, Bart (2008)