Browsing by author "Saito, S.I."

Now showing items 1-1 of 1

The impact of sub monolayers of HfO2 on the device performance of high-k transistors

Ragnarsson, Lars-Ake; Pantisano, Luigi; Kaushik, Vidya; Saito, S.I.; Shimamoto, Yasuhiro; De Gendt, Stefan; Heyns, Marc (2003-12)