Publication:

The impact of sub monolayers of HfO2 on the device performance of high-k transistors

Date

2003-12

Proceedings Paper

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Author(s)

Ragnarsson, Lars-Ake

;

Pantisano, Luigi

;

;

;

Shimamoto, Yasuhiro

;

De Gendt, Stefan

;

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1931 since deposited on 2021-10-15

Acq. date: 2026-02-24