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The impact of sub monolayers of HfO2 on the device performance of high-k transistors
Publication:
The impact of sub monolayers of HfO2 on the device performance of high-k transistors
Date
2003-12
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ragnarsson, Lars-Ake
;
Pantisano, Luigi
;
Kaushik, Vidya
;
Saito, S.I.
;
Shimamoto, Yasuhiro
;
De Gendt, Stefan
;
Heyns, Marc
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1924
since deposited on 2021-10-15
413
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1924
since deposited on 2021-10-15
413
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations