Browsing by author "DiBiase, Tony"
Now showing items 1-3 of 3
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A methodology for the characterization of topography induced immersion bubble defects
Kocsis, Michael; De Bisschop, Peter; Maenhoudt, Mireille; Kim, Young-Chang; Wells, Greg; List, Scott; DiBiase, Tony (2005) -
Full spectral analysis of line edge roughness
Leunissen, Peter; Lorusso, Gian; Ercken, Monique; Croon, Jeroen; Yang, H.; Azordegan, A.; DiBiase, Tony (2005) -
On-line spectral analysis of line edge roughness: algorithms qualification and transfer to etch
Leunissen, Peter; Lorusso, Gian; DiBiase, Tony; Yang, H.; Azordegan, A. (2005)