Browsing by author "Gondran, C."
Now showing items 1-5 of 5
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On the reliability of SIMS depth profiles through HfO2-stacks
Vandervorst, Wilfried; Benett, J.; Huyghebaert, Cedric; Conard, Thierry; Gondran, C.; De Witte, H. (2003) -
On the reliability of SIMS depth profiles through HfO2-stacks
Vandervorst, Wilfried; Bennett, J.; Huyghebaert, Cedric; Conard, Thierry; Gondran, C.; De Witte, Hilde (2004) -
Sputter rate variations in silicon under high k dielectric films
Benett, Joe; Vandervorst, Wilfried; Beebe, M.; Sparks, C.; Gondran, C. (2003) -
Sputter rate variations in silicon under high-k dielectric films
Bennett, J.; Beebe, M.; Sparks, C.; Gondran, C.; Vandervorst, Wilfried (2004-05) -
Sputter rate variations in silicon under high-k dielectric films
Bennett, J.; Beebe, M.; Sparks, C.; Gondran, C.; Vandervorst, Wilfried (2004)