On the reliability of SIMS depth profiles through HfO2-stacks

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Authors
Vandervorst, Wilfried; Benett, J.; Huyghebaert, Cedric; Conard, Thierry; Gondran, C.; De Witte, H.
Conference
International Conference on Secondary Ion Mass Spectrometry - SIMS XIV
Title
On the reliability of SIMS depth profiles through HfO2-stacks
Publication type
Meeting abstract
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