Publication:

On the reliability of SIMS depth profiles through HfO2-stacks

Date

2003

Meeting abstract

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Author(s)

Vandervorst, Wilfried

;

;

Huyghebaert, Cedric

;

Conard, Thierry

;

;

Statistics

1810 since deposited on 2021-10-15

Acq. date: 2026-01-27