Browsing by author "Neikirk, Colin"
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Fluorinated polymethacrylates as highly sensitive non-chemically amplified e-beam resists
Straham, Jeffrey; Adams, Jacob; Jen, Wei-Lun; Vanleenhove, Anja; Neikirk, Colin; Rochelle, Timothy; Gronheid, Roel; Willson, Grant (2009)