Browsing by author "Dordi, Yezdi"
Now showing items 1-1 of 1
-
Enabling sub 20nm Cu metallization with PEALD Ru-TiN barrier and ELD seed
Siew, Yong Kong; Swerts, Johan; Dictus, Dries; El-Mekki, Zaid; Armini, Silvia; Dordi, Yezdi; Yoon, Alex; Kolics, Artur; Barbarin, Yohan; Croes, Kristof; Boemmels, Juergen; Tokei, Zsolt (2012)