Browsing by author "Kudriashov, Vladislav"
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EUV mask defectivity study by existing DUV tools and new EBEAM technology
Mangan, Shmoolik; Jonckheere, Rik; Van Den Heuvel, Dieter; Rozentsvige, Moshe; Kudriashov, Vladislav; Shoval, Lior; Santoro, Gaetano; Englard, Ilan (2010)