Browsing by author "Van Cauwenberghe, M."

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Resist strip and Cu diffusion barrier etch in Cu BEOL integration schemes in a Mattson Highlands chamber

Mannaert, Geert; Van Cauwenberghe, M.; Schmidt, Michael; Van Aelst, Joke; Hendrickx, Dirk; Stucchi, Michele; Conard, Thierry; Vanhaelemeersch, Serge; Boullart, Werner (2002)