Browsing by author "Proells, Julian"
Now showing items 1-1 of 1
-
CMP Slurries for germanium substrates in FEOL applications
Ong, Patrick; Siebert, Joerg Max; Noller, Bastian; Lan, Yongqing; Lauter, Michael; Proells, Julian; Huang, Kevin; Usman Ibrahim, Sheik Ansar (2013)