Browsing by author "Prado, J.L."
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The effect of Ar/H2 plasma pretreatments on porous k=2.0 dielectrics for pore sealing by self-assembled monolayers deposition
Sun, Yiting; Swerts, Johan; Verdonck, Patrick; Maheshwari, Abhishek; Prado, J.L.; De Feyter, Steven; Armini, Silvia (2013)