Publication:
The effect of Ar/H2 plasma pretreatments on porous k=2.0 dielectrics for pore sealing by self-assembled monolayers deposition
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1905 since deposited on 2021-10-21
1last month
Acq. date: 2026-01-09
Citations
Metrics
Views
1905 since deposited on 2021-10-21
1last month
Acq. date: 2026-01-09
Citations