Authors

Sun, Yiting; Swerts, Johan; Verdonck, Patrick; Maheshwari, Abhishek; Prado, J.L.; De Feyter, Steven; Armini, Silvia

Conference

Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS

Title

The effect of Ar/H2 plasma pretreatments on porous k=2.0 dielectrics for pore sealing by self-assembled monolayers deposition

Publication type

Proceedings paper