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The effect of Ar/H2 plasma pretreatments on porous k=2.0 dielectrics for pore sealing by self-assembled monolayers deposition
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1905 since deposited on 2021-10-21
3last month
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Acq. date: 2025-12-12
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Views
1905 since deposited on 2021-10-21
3last month
2last week
Acq. date: 2025-12-12
Citations