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The effect of Ar/H2 plasma pretreatments on porous k=2.0 dielectrics for pore sealing by self-assembled monolayers deposition
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1906 since deposited on 2021-10-21
1last month
Acq. date: 2026-04-26
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Views
1906 since deposited on 2021-10-21
1last month
Acq. date: 2026-04-26
Citations