Browsing by author "Gaulhofer, E."
Now showing items 1-2 of 2
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A study in interactions of plasmas and wet cleans with ULK materials
Xu, Kaidong; Vereecke, Guy; Kesters, Els; Le, Quoc Toan; Lux, Marcel; Kraus, Harald; Henry, Sally - Ann; Archer, L.; Gaulhofer, E.; Kovacs, F.; Dalmer, M.; Mertens, Paul; Luo, S. J; Han, Q. Y (2007) -
Effect of plasma treatments on the compatibility of ULK to wet cleaning
Xu, Kaidong; Kesters, Els; Vereecke, Guy; Lux, Marcel; Kraus, H; Henry, S.A.; Archer, L; Gaulhofer, E.; Kovacs, F.; Dalmer, M; Schmidt, T; Leunissen, Peter; Mertens, Paul; Luo, S.J.; Han, Q. Y. (2007)