A study in interactions of plasmas and wet cleans with ULK materials

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Authors
Xu, Kaidong; Vereecke, Guy; Kesters, Els; Le, Quoc Toan; Lux, Marcel; Kraus, Harald; Henry, Sally - Ann; Archer, L.; Gaulhofer, E.; Kovacs, F.; Dalmer, M.; Mertens, Paul; Luo, S. J; Han, Q. Y
Conference
1st International Workshop Plasma Etch and Strip in Microelectronics - PESM
Title
A study in interactions of plasmas and wet cleans with ULK materials
Publication type
Proceedings paper
Embargo date
9999-12-31
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