Browsing by author "Muscat, Anthony"
Now showing items 1-2 of 2
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Kinetic to transport-limited anhydrous HF etching of silicon oxynitride films in supercritical CO2
Morrish, Rachel; Witvrouw, Ann; Muscat, Anthony (2007) -
Supercritical CO2 low-k dielectric repair
Malhouitre, Stephane; Van Hoeymissen, Jan; Muscat, Anthony; Granger, Pascal; Mertens, Paul (2005)