Publication:

Supercritical CO2 low-k dielectric repair

Date

2005

Proceedings Paper

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Author(s)

Malhouitre, Stephane

;

Van Hoeymissen, Jan

;

Muscat, Anthony

;

Granger, Pascal

;

Statistics

1915 since deposited on 2021-10-16

Acq. date: 2026-02-27