Browsing by author "Huang, Kevin"

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CMP on SiGe materials - linking chemical and physical properties to design low defect selective slurries

Ong, Patrick; Siebert, Max; Huang, Kevin; Teugels, Lieve; Ansar, Sheik; Leunissen, Peter (2014)
CMP Slurries for germanium substrates in FEOL applications

Ong, Patrick; Siebert, Joerg Max; Noller, Bastian; Lan, Yongqing; Lauter, Michael; Proells, Julian; Huang, Kevin; Usman Ibrahim, Sheik Ansar (2013)