Browsing by author "Burgess, Simon"

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Composition quantification of microelectronics multilayer thin films by EDX: toward small scale analysis

Conard, Thierry; Arstila, Kai; Hantschel, Thomas; Franquet, Alexis; Vandervorst, Wilfried; Vecchio, Emma; Bauer, Frank; Burgess, Simon (2009)
Compositional depth profiling of TaCN thin films

Adelmann, Christoph; Conard, Thierry; Franquet, Alexis; Brijs, Bert; Munnik, Frans; Burgess, Simon; Witters, Thomas; Meersschaut, Johan; Kittl, Jorge; Vandervorst, Wilfried; Van Elshocht, Sven (2012)