Browsing by author "Nakajima, M."
Now showing items 1-4 of 4
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Evaluation of an advanced organic ultra-low-k material
Ferchichi, Abdelkarim; Travaly, Youssef; Carbonell, Laure; Vanstreels, Kris; Beyer, Gerald; Baklanov, Mikhaïl; Asakuma, S.; Nakajima, M. (2009) -
Integration of an organic ultra low-k (k=2.2) material
Pantouvaki, Marianna; Zhao, Larry; Huffman, Craig; Heylen, Nancy; Ferchichi, Abdelkarim; Ono, Y.; Nakajima, M.; Nakatani, K.; Struyf, Herbert; Beyer, Gerald; Baklanov, Mikhaïl (2009) -
Integration of an organic ultra low-k (k=2.2) material
Pantouvaki, Marianna; Zhao, Larry; Huffman, Craig; Heylen, Nancy; Ferchichi, Abdelkarim; Ono, Y.; Nakajima, M.; Nakatani, K.; Struyf, Herbert; Beyer, Gerald; Baklanov, Mikhaïl (2010) -
Process compatibility of new advanced low-k dielectric
Ferchichi, Abdelkarim; Vanstreels, Kris; Heylen, Nancy; Beyer, Gerald; Baklanov, Mikhaïl; Asakuma, S.; Nakajima, M. (2009)