Integration of an organic ultra low-k (k=2.2) material

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Authors
Pantouvaki, Marianna; Zhao, Larry; Huffman, Craig; Heylen, Nancy; Ferchichi, Abdelkarim; Ono, Y.; Nakajima, M.; Nakatani, K.; Struyf, Herbert; Beyer, Gerald; Baklanov, Mikhaïl
Conference
Advanced Metallization Conference 2009 - AMC 2009
Title
Integration of an organic ultra low-k (k=2.2) material
Publication type
Proceedings paper
Embargo date
9999-12-31
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