Browsing by author "Koji, Kagawa"

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Development of integrated wet cleans for 3D-SIC technologies

Suhard, Samuel; Simms, Ihsan; Brown, Ian; Shogo, Mizota; Koji, Kagawa; Claes, Martine; Buisson, Thibault; Jourdain, Anne; Beyer, Gerald; De Gendt, Stefan (2013)