Browsing by author "Clark, Benjamin L."
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Demonstration of an N7 integrated fab process for metal oxide EUV photoresist
De Simone, Danilo; Mao, Ming; Kocsis, Michael; De Schepper, Peter; Lazzarino, Frederic; Vandenberghe, Geert; Yamashita, Fumiko; Stowers, Jason; Meyers, Steven; Grenville, Andrew; Luong, Vinh; Parnell, Doni; Clark, Benjamin L. (2016) -
Integrated fab process for metal oxide EUV photoresist
Grenville, Andrew; Anderson, Jeremy T.; Clark, Benjamin L.; De Schepper, Peter; Edson, Joseph; Greer, Michael; Kai, Jiang; Kocsis, Michael; Meyers, Stephen T.; Stowers, Jason K.; Telecky, Alan J.; De Simone, Danilo; Vandenberghe, Geert (2015) -
Optimization of Point-Of-Use Filtration for Metal Oxide Photoresist
Wu, Aiwen; Tang, Harvey; Conner, Gregg; Chang, Shu Hao; Giordano, Gaetano; Smiddy, Dominick; Geniza, Mark; Clark, Benjamin L. (2021)