Browsing by author "Waehler, Tobias"
Now showing items 1-3 of 3
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Effective EUVL mask cleaning technology solutions for mask manufacturing and in-fab mask maintenance
Dietze, Uwe; Dress, Peter; Waehler, Tobias; Singh, Sherjang; Jonckheere, Rik; Baudemprez, Bart (2011) -
Integrated cleaning and handling automation of NXE3100 reticles
Jonckheere, Rik; Waehler, Tobias; Baudemprez, Bart; Dietze, Uwe; Dress, Peter; Brux, Oliver; Ronse, Kurt (2012) -
Minimizing particle contamination of NXE3100 reticles
Jonckheere, Rik; Baudemprez, Bart; Waehler, Tobias; Van Den Heuvel, Dieter; Schmalfuss, Heiko; Brux, Oliver; Dress, Peter; Kappel, Christophe; Zickler, Leander (2012)