Browsing by author "Hansen, Steven G."
Now showing items 1-2 of 2
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Empirical correlator for stochastic local CD uniformity in extreme ultraviolet lithography
De Bisschop, Peter; Hansen, Steven G. (2022) -
Progress in 157-nm resist performance and potential
Wong, Patrick; Sinkwitz, Stephan; Hansen, Steven G.; Goethals, Mieke; Conley, Will (2002)