Browsing by author "Grinninger, F."

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Selective etching of SiGe for removal of dummy layers in fully silicided gate artchitectures

Snow, Jim; Vos, Rita; Kottantharayil, Anil; Kraus, Harald; Xu, Kaidong; Grinninger, F.; Wagner, G.; Kovacs, F.; Mertens, Paul (2005)