Browsing by author "Deforce, Jacob"
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Towards Improved Semiconductor Defect Inspection for high-NA EUVL based on SEMI-SuperYOLO-NAS
Chen, Ying-Lin; Deforce, Jacob; De Ridder, Vic; Dey, Bappaditya; Blanco, Victor; Halder, Sandip; Leray, Philippe (2024)