Browsing by author "Suzuki, Ryoichi"

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Characterization of porous structures in advanced low-k films with thin TaN layers using monoenergetic positron beams

Uedono, Akira; Verdonck, Patrick; Delabie, Annelies; Swerts, Johan; Witters, Thomas; Conard, Thierry; Baklanov, Mikhaïl; Van Elshocht, Sven; Oshima, Nagayasu; Suzuki, Ryoichi (2013)