Browsing by author "Deloffre, E."

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Atomic layer deposition: an enabling technology for microelectronic device manufacturing

Lee, F.; Marcus, S.; Shero, E.; Wilk, G.; Swerts, Johan; Maes, Jan; Blomberg, T.; Delabie, Annelies; Gros-Jean, M.; Deloffre, E. (2007)