Browsing by author "Popa, Ovidiu"
Now showing items 1-2 of 2
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Attenuated phase shift maks using MoSi as an opaque layer
Popa, Ovidiu; Jonckheere, Rik (1995) -
Molybdenum Silicide Based Attenuated Phase-Shift Masks
Jonckheere, Rik; Ronse, Kurt; Popa, Ovidiu; Van den hove, Luc (1994)