Molybdenum Silicide Based Attenuated Phase-Shift Masks

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Authors

Jonckheere, Rik; Ronse, Kurt; Popa, Ovidiu; Van den hove, Luc

Issue

6

Journal

J. Vac. Sci. Technol. B

Volume

12

Title

Molybdenum Silicide Based Attenuated Phase-Shift Masks

Publication type

Journal article

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