Browsing by author "Amanapu, Hariprasad"
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Role of ruthenium texture and guanidine carbonate on chemical mechanical polishing of ruthenium films
Amanapu, Hariprasad; Sagi, Kaushik; Teugels, Lieve; Babu, S.V. (2013) -
The effect of material texture in the CMP of ruthenium films
Teugels, Lieve; Amanapu, Hariprasad; Sagi, Kaushik; Heylen, Nancy; Babu, S.V. (2013)