Browsing by author "Giles, Luis Felipe"
Now showing items 1-1 of 1
-
On the role of nanocavities in suppressing boron transient enhanced diffusion and deactivation in F+ coimplanted silicon
Giles, Luis Felipe; Stapelmann, Chris; Cerva, Hans; Jahnel, Franz; Demeurisse, Caroline; Vrancken, Christa; Hoffmann, Thomas Y. (2008)