Browsing by author "Psara, Eleni"
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Edge placement error analysis for N7 logic patterning options
van Setten, Eelco; Psara, Eleni; Wittebrood, Friso; Oorschot, Dorothe; van Dijk, Joep; Schiffelers, Guido; Finders, Jo; Dusa, Mircea; Philipsen, Vicky; Hendrickx, Eric (2015) -
Patterning options for N7 logic : Prospects and challenges for EUV
van Setten, Eelco; Wittebrood, Friso; Psara, Eleni; van Oorschot, Dorothe; Philipsen, Vicky (2015)