Browsing by author "Erdman, Andreas"
Now showing items 1-3 of 3
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Mask defects in EUV lithography: Understanding
Erdman, Andreas; Evanschitzky, Peter; Bret, Tristan; Jonckheere, Rik (2012) -
Modeling strategies for EUV mask multilayer defect dispositioning
Erdman, Andreas; Evanschitzky, Peter; Bret, Tristan; Jonckheere, Rik (2013) -
Rigorous modeling and optimization
Erdman, Andreas; Evanschitzky, Peter; Bret, Tristan; Jonckheere, Rik (2012)