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    • Standard cell design in N7: EUV vs. immersion 

      Chava, Bharani; Rio, David; Sherazi, Yasser; Trivkovic, Darko; Gillijns, Werner; Debacker, Peter; Raghavan, Praveen; Elsaid, Ahmad; Dusa, Mircea; Mercha, Abdelkarim; Ryckaert, Julien; Verkest, Diederik (2015)