Browsing by author "Azordegan, A."
Now showing items 1-3 of 3
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Full spectral analysis of line edge roughness
Leunissen, Peter; Lorusso, Gian; Ercken, Monique; Croon, Jeroen; Yang, H.; Azordegan, A.; DiBiase, Tony (2005) -
Impact of LER and CDU on device performance
Leunissen, Peter; Lorusso, Gian; Ercken, Monique; Croon, Jeroen; Jurczak, Gosia; Zhang, Wenqi; Wu, W.; Yang, H.; Azordegan, A.; DiBiase, T. (2005) -
On-line spectral analysis of line edge roughness: algorithms qualification and transfer to etch
Leunissen, Peter; Lorusso, Gian; DiBiase, Tony; Yang, H.; Azordegan, A. (2005)