Browsing by author "Lin, G."
Now showing items 1-2 of 2
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Defect mitigation and root cause studies in imec's 14 nm half-pitch chemo-epitaxy DSA flow
Pathangi Sriraman, Hari; Chan, BT; Bayana, Hareen; Van Den Heuvel, Dieter; Van Look, Lieve; Rincon Delgadillo, Paulina; Cao, Yi; Kim, YiHoon; Lin, G.; Parnell, Doni; Nafus, Kathleen; Harukawa, Ryoto; Chikashi, Ito; Nagaswami, Venkat; D'Urzo, Lucia; Gronheid, Roel; Nealey, Paul (2015) -
Implementation of templated DSA for via layer patterning at the 7 nm node
Gronheid, Roel; Doise, Jan; Bekaert, Joost; Chan, BT; Karageorgos, Ioannis; Ryckaert, Julien; Vandenberghe, Geert; Cao, Yi; Lin, G.; Somervell, Mark; Fenger, Germain; Fuchimoto, Daisuke (2015)