Publication:

Defect mitigation and root cause studies in imec's 14 nm half-pitch chemo-epitaxy DSA flow

Date

2015

Proceedings Paper

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Files

30361.pdf 2.77 MB

Author(s)

Pathangi Sriraman, Hari

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Van Den Heuvel, Dieter

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Van Look, Lieve

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Rincon Delgadillo, Paulina

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Nafus, Kathleen

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Harukawa, Ryoto

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Nagaswami, Venkat

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Statistics

2007 since deposited on 2021-10-22

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Acq. date: 2026-02-28